durusmail: mems-talk: Help needed for PMMA Exposure
Help needed for PMMA Exposure
2006-05-30
2006-05-31
2006-05-31
Help needed for PMMA Exposure
Abhay Kulkarni
2006-05-30
Hello all,

I want to expose(crosslink) 950K A1 PMMA (Thickness of about 5-8mm) from
Michrochem (suggested parameters by michrochem  : doses >500mJ/cm2 at peak
wavelength of 248nm).
But the aligner I am using does not have UV/X-ray capabilities, Has anyone
encountered such problem?. Especially with such thick PMMA layer. What are
my options? I was thinking of using an external exposure UV-C source.

Any help in this regard will be grately appreciated.

Regards,
Abhay K
MS student.
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