Use aqua regia: 3 HCl: 1 HNO3 at ~80C. You might first try this at room temperature. -Mike Martin U. of Louisville >>> jhkim03@ucla.edu 06/22/06 4:51 PM >>> Dear colleagues, I will use the Pt to protect my Si wafer surface for anodization. Is there any one who has a recipe for removing Pt without attacking Si surface?