Maybe you can try dip coating.  Once you take the sample out of the parent
solution, you can use a doctor blade to wipe off the excess and have a
uniform thickness of 1 micron.  They make different thicknesses of doctor
blades that give you a wide range.  This process, if I recall correctly,
is known as "knife coating."  So you would have to do a 2-step process,
start with dip coating to fill up the trenches and then do a knife coating
to attain teh required surface coverage thickness.

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Rajib Ahmed
347 Hopeman Engineering Building
Department of Electrical and Computer Engineering
University of Rochester
Rochester, NY 14627-0167
Email:rajib@ece.rochester.edu
Phone#:(585)275-8093
Fax#:(585)273-4919
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