Hi all,
Someone asked about how to fabricate a rounded microchannel and got some good
responses. I would like to push this question further for my own research. I
need a real rounded (360 degree) microchannel network with the smallest channel
having the diameter of 5 micron. With the photoresist reflow technology, what we
really get is a half rounded channel. Of course, I can bond two of them
together, but the alignment would be very difficult with the tolerance of less
than 1 micron.
anyone has any suggestions?
Thanks

Zhizhong