Not knowing the details I am asuming that you have a 1 micon thick Pt layer which you need to pattern. If all fails may I suggest a lift of process works well with Pt and saves money. Regards Walter foundry@lume.com ----- Original Message ----- From: "Phillipe Tabada"To: Sent: Friday, July 07, 2006 11:44 AM Subject: [mems-talk] Ion Mill Services > Hi, > > Looking for a company who can ion mill 1 um of Pt using photoresist as > a mask. Then remove the mask using wet etching (no ashing). This is for > low volume research quantities. > > Phil