Dupont polyimide (PI-2700) process guidelines
recommend fuming 100% ethylene diamine (ED) at 60 C.
I have used this successfully to strip pimd from coated fibers.
This is more of a stripping method - you get to define an appropriate
mask material and translate this info into a controlled etch.
Good Luck,
Bill Flounders
Berkeley Microlab


Michael D Martin wrote:
> Angelo,
>    A wet etching technique for kapton was developed at CERN by Fabio
> Sauli's group for making "GEM" radiation detectors.  As far as I know
> they have kept the tricks to doing it close to the vest but I think it
> involves the use of EDP (ethylene diamine pyrochatachol). You might be
> able to find some vague information in the iterature. See
> http://www.osti.gov/energycitations/servlets/purl/10149501-kxm6CU/native/10149
501.pdf
>
> Good luck,
>     Mike
>
>
>>>> "Angelo Gobbi"  07/12/06 12:58 PM >>>
>>>>
> Hi,
>
> Does anybody know how to wet etching Kapton?
> I want to make 60um diameter hole in a 50um thick kapton foil.
>
> Can any one suggest some etchant/methods?