Christophe,
Yes, I have done this. The best way to impliment this is to create pedestals for
the sample to sit on (I break very small pieces from scrape silicon and paste
them to the carrier with resist also). There is too much surface area if you
don't use pedestals and your sample will be very difficult to get off. After you
paste the sample to the pedestals let it air dry. To remove just put it on a hot
plate at about 100 C and the sample will come off in about a minute.
I am interested to see some of the other comments you may have received from
others. Could you please forward them. Thanks
***************************************************
Jim Culver
Principal Engineer
Raytheon
Communication Division
1501 72nd Street
St Petersburg, FL 33710
voice (813) 302-3146
fax (813) 302-4791
e-mail jwcb@eci-esyst.com
***************************************************
> From mems-mgr@ISI.EDU Sat Jun 27 17:11:54 1998
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> Date: Fri, 26 Jun 1998 12:21:16 +0100
> From: Christophe Sudre
> Subject: Resist as paste
> To: MEMS@ISI.EDU
> X-Url: http://mems.isi.edu/mems.html
> Reply-To: Christophe Sudre , mems-cc@ISI.EDU
> Content-Length: 1198
>
> Hi everybody
>
> I'm going to do some process with SiC wafers. The problem is the machine
> I can use are designed for 4 inch wafers .. and my SiC wafers are 1.3
> inch cutted in four !!! For the sputter deposition machine, no problem,
> I can use a metal wafer with clips to fix the little wafer. For the
> implanter, I can't use that and I must stick the wafer on a 4 inch Si
> wafer. The only way I see is to use resist. Do you have other ideas ?
> Did somebody use resist as paste ? How did you that ?
>
> Many thanks per advance, Christophe Sudre
>
> --
>
_______________________________________________________________________________
> | Dr Christophe Sudre Fax : 353 21 270271
|
> | Research Scientist Phone : 353 21 904079
|
> | University College Cork WWW :
http://www.nmrc.ucc.ie/|
> | National Microelectronics Research Center Email: csudre@nmrc.ucc.ie
|
> | Lee Maltings, Prospect Row
|
> | Cork, Ireland
|
> |_____________________________________________________________________________
__|
>
>
>
>
>