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MEMS Membrane Analytical Verification
2006-07-18
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MEMS Membrane Analytical Verification
Dhorje, Mrugesh
2006-07-18
Hello to All

I am Mrugesh Dhorje, doing my MS in Mechanical Engg. at Texas Tech University,
Lubbock, Texas.

I am trying to model a pressure sensor MEMS membrane (both circular and
Rectangular shape) in Ansys Educational version.

I would like to know if there is any analytical formulation relating the applied
pressure with the deflection so that I can compare whether the model is
converging or not.

Also can I know some reference to analytical calculation of stresses with
applied pressure once the membrane is deflected (in elastic and also in plastic
region)

Initially I searched memsnet for such solutions, but I found that the references
are pretty old and after that there have been many recent developments in the
theories.

Thanking you in anticipation.

Regards
Dhorje Mrugesh

Product Design and Development Lab.
Mechanical Engineering Dept.
Texas Tech University.
Lubbock, Texas

Phone No: 806-742-3535 extn 272
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