Two references come to mind

Roark's Formulas for Stress and Strain by Warren C. Young, Richard Budynas
Theory of Plates and Shells by Stephen Timoshenko

Loren.

 -----Original Message-----
From:   mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]  On
Behalf Of Dhorje, Mrugesh
Sent:   Tuesday, July 18, 2006 12:42 PM
To:     mems-talk@memsnet.org
Subject:        [mems-talk] MEMS Membrane Analytical Verification

Hello to All

I am Mrugesh Dhorje, doing my MS in Mechanical Engg. at Texas Tech University,
Lubbock, Texas.

I am trying to model a pressure sensor MEMS membrane (both circular and
Rectangular shape) in Ansys Educational version.

I would like to know if there is any analytical formulation relating the applied
pressure with the deflection so that I can compare whether the model is
converging or not.

Also can I know some reference to analytical calculation of stresses with
applied pressure once the membrane is deflected (in elastic and also in plastic
region)

Initially I searched memsnet for such solutions, but I found that the references
are pretty old and after that there have been many recent developments in the
theories.