>From my experience even solvent clean (acetone + methanol) in an ultrasonic
bath would do. I heard that piranha caused some problems in the past. So may
be you want to try solvents first and if it doesn't work then you may try
Piranha.

Regards,
Sreemanth


>From: Joseph Grogan 
>Reply-To: General MEMS discussion 
>To: General MEMS discussion 
>Subject: Re: [mems-talk] SU 8 removal
>Date: Mon, 24 Jul 2006 14:12:52 -0400
>
>Try Piranha cleaning (sulfuric acid + hydrogen peroxide), and remember to
>be careful with the solution.
>