Hi. Contact Perry Genova at IEP Group in North Carolina: (919) 787-8666. They do wafer/MEMS polishing. At 12:05 PM 7/6/98 -0500, you wrote: >Dear friends, > >I am looking for a place to get done CMP (Chemical Mechanical >Polishing) of a small number (10-20) of 4" silicon wafers covered with >1um film of silicon nitride. I want to remove 50-100nm of silicon >nitride. > >I would greatly appreciate your input. > >Thanks, >Dragoslav Mitrinovic > >