durusmail: mems-talk: Pt on Si
Pt on Si
2006-07-31
2006-08-03
2006-08-03
2006-08-04
Pt on Si
Jeehwan Kim
2006-07-31
Hi,

I will try to deposite 200nm Pt on Si wafers. Is it possible without
adhesion layer?

I succeed to deposite 50 nm Pt on Si before.

Please reply me if you have an idea.

Thank you in advance.

J. Kim

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