This sounds like "T-topping" (overexposure of the top layer due to strong absorption below 350nm). Try filtering your UV source with a long pass filter to cut out <350nm. Marhefka, Joie wrote: > Hi! > > I am fabricating microchannels in PDMS from an SU-8 on silicon master. > I am having a hard time getting a rectangular cross section. My cross > section has both "ears" at the PDMS side, and a bit of a "lip" at the > open side. From talking with some others, I believe that the "ears" on > the PDMS side are due to overexposure of the SU-8. Does anyone have any > ideas what may be causing a "lip" on the open side and how to get rid of > this and get a more rectangular cross section? > Thanks, > Joie >