Pat:  we have seen the same problem.  I think it is over-priming with HMDS.
 We also see it if the resist is not sufficiently pre-baked (check oven
temperature).  I'd be interested to hear what other responses you get.
   Jon Bernstein
   Draper Labs

At 08:21 AM 4/2/98 -0600, you wrote:
> Has anyone ever heard of this term. We are using it to describe a
>problem we are having along an exposed region of photoresist where the
>resist "pops" off leaving a semi-circle in the remaining pattern edge.
>We are using a 5 minute vapor prime but we have seen the same problem at
>lesser times so I dont think we are overpriming the wafers. You can
>immediatly tell after exposure if mousebites are there as they leave a
>bubbly area in some areas of the wafer which is visible to the eye
>before develop. This problem does not occur every time (15-20%). Any
>suggestions would be greatly appreciated.
>
>Please reply to phowell@i-o.com
>
>Regards, Pat Howell
>
>
>
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