Dear sir
I haven't heard about this problem before: the source used for Al should
also fit Cr evaporation.
It is just a matter of calibration of the evaporation system.The system
I use here at MIC is an Alcatel system and the same source is used for
Al and Cr.
regards. Mounir Ennabli

Mounir Ennabli.
Mikroelektronik Centret, byg. 344, rum 154
DTU, DK-2800 Lyngby.
e-mail:me@mic.dtu.dk
Phone:+45 4525 5734

> -----Original Message-----
> From: Cheol-Hyun Han [SMTP:cheol@spectra.eng.hawaii.edu]
> Sent: 4. april 1998 05:26
> To:   MEMS@ISI.EDU
> Subject:      Looking for "Cr evaporation"
>
> Hi,;
> I'm looking for the way and tools for Chromium(Cr) evaporation.   I'm
> trying to use Al evaporation system in which I used tungsten filament
> with Al wire source.   But I don't know if there wire type Chromium
> source is
> and I can use same machine in our lab. for Al evaporation.
>    If anyone know the source type of Cr and what I can use to
> evaporate
> it(boat or filament), please let me know and any information would be
> welcomed. Thank you.
>