Did you ever get any answers to your question?  I also need this
information as well as if there is anything that etches nickel but not
copper.

Any information that you have would be appreciated.

Thanks,

John Karpinsky

Jun Zou wrote:

> Hi,
>
> Now we are developing a structure, using Ni(structural layer) and Cu
> (sacrificial layer). We want to find a good etchant for Cu, but not
> attacking Ni or permalloy.
>
> So could anyone give me some information about that?
>
> Thanks a lot!
>
> Jun Zou
>
> --------------------------
> Jun Zou
> 209 E.Clark Street Apt#2
> Champaign, IL 61820
> USA
> Tel:(217)-265-0808(O) (217)-351-7448(H)
> E-mail: junzou@uiuc.edu
> --------------------------



--
John R. Karpinsky  ---  Chief Physicist
MEMS Optical, Inc., 205 Import Circle, Huntsville, AL 35806
Tel: 205-859-1886  Fax: 205-859-5890  Email: johnk@memsoptical.com