durusmail: mems-talk: Dicing sapphire
Dicing sapphire
2006-08-22
2006-08-23
Dicing sapphire
malxj@tom.com
2006-08-23
Hi,Shay, in the InGaN/Sapphire LED chip fabricaiton, UV laser scribing and
breaking is the most popular way to cut the sapphire wafer, but they are quite
limit to a stand ~90 microns thick wafers, you can try laser scribing two
sides/breaking to your 200 microns wafers.

Peter Ma
Malxj@tom.com

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