Hi, Dear all
Right now I am using SU-8 100 as one of my structure layers. I want the SU-8
layer to be as thick as possible and it need to stay after the process. My
spinning speed is about 1000 rpm for 30s, the approximate thickness is around
200 um. I tried to cure it in nitrogen oven at 250 degree for 3 hours, but the
SU-8 cracked.

Does anyone by chance know the full cure heating profile ? Any help will be
appreciated

Thanks so much
J.J. Wang