>Hello,
>For people searching on Deep Si etched structures:
>STS (http://www.stsystems.com/index.html) and Alcatel both develloped some
>processes and etched some devices for us, as we were looking for an ICP
>etcher. I suggest you contact them with those very specific questions. Our
>experience is that a lot can be done, but that each mask pattern requires
>its own fine-tuned process...
>
>Wouter van der Wijngaart
>Kungl. Tekniska H gskolan      Tel:    +46 - (0)8 - 790 66 13
>S3, Elektrisk m tteknik        Fax:    +46 - (0)8 - 10 08 58
>100 44  Stockholm              Minicall:       +46 - (0)740 - 26 71 28
>Sweden                 e-mail: wouter@s3.kth.se
>http://www.s3.kth.se/instrlab/staff/wouterw.html
>
>
>

Plasma Therm in Florida, USA developed a very good ICP etcher which we use
at my
business very successfully.

Jay Mathews
Development Engineer
Digital Optics Corp
704-599-9191