durusmail: mems-talk: COC wafer thinning
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2006-08-22
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2006-08-24
COC wafer thinning
2006-08-24
COC wafer thinning
matt estes
2006-08-24
Does anyone have any experience with thinning a COC wafer using only heat
and pressure.  I have been able to get a single wafer down to 280um
thickness using 185C and 4.5Kg for 20 minutes, but I seen to have hit a bit
of a lower bounds.


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