Nam It has been noticed that stainless steel in a KOH solution contaminates the bath and will make etched surfaces very rough (we also found this out the hard way here) by leaving a residue on the surface. I don't see why that couldn't happen in TMAH as well. PEEK is a better material for the chip holder. Reference below. T A Kwa et al 1995 J. Micromech. Microeng. 5 95-97 Dylan J. Morris, Ph.D. Washington State University Center for Materials Research