durusmail: mems-talk: Gas mixing chamber
Gas mixing chamber
2006-08-23
2006-08-24
2006-08-24
2006-08-24
Gas mixing chamber
Brent Garber
2006-08-24
Gary,

Can you use heat tape?  Brisk Heat makes every kind of flexible electric
heat tape.

Brent

amron gary wrote:

> Hello:
>
> I have a 10"x1" gas mixing chamber. My diffusion gases
> are N2 and C2H2. Currently, gas mixing chamber is at
> ambient. I want to keep the temperature of my gas
> mixing chamber around 100 deg C in order to have
> better diffusion of gases before they go to the PVD
> chamber. Are there any heaters or heating techniques
> that I can use outside my PVD to keep this gas mixing
> chamber hotter than ambient?
reply