durusmail: mems-talk: Evaporation of Silica
Plasma chamber
2006-08-29
2006-08-29
2006-08-29
Evaporation of Silica
2006-08-30
hardbaked photoresist...
2006-08-30
2006-08-30
Evaporation of Silica
Sreemanth M Uppuluri
2006-08-30
Hello Everyone,

I am trying to coat silica films on my samples using e-beam evaporation. I
need a very thin coating (< 20 nm). I am wondering if this thickness is
adequate to ensure coverage over my entire sample (0.5" * 0.5"). Please let
me know if you have any pointers in this matter.

Thanks,

Sreemanth
Purdue University
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