durusmail: mems-talk: hardbaked photoresist...
Plasma chamber
2006-08-29
2006-08-29
2006-08-29
Evaporation of Silica
2006-08-30
hardbaked photoresist...
2006-08-30
2006-08-30
hardbaked photoresist...
Jan Michael Kubr
2006-08-30
I have a problem in that I cannot get hardbaked PR (SPR-220) of my
surfaces, both gold and Si.

With the gold sitting on TiW, piranha is not really a feasible solution.
I have tried long o2 plasma ashes and overnight baths in heated prs-3000
with little success.

Any other solutions I can try?

Sincerely,

Michael
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