durusmail: mems-talk: device passivation layer
device passivation layer
2006-09-05
2006-09-06
2006-09-06
device passivation layer
Viswanadam, Gautham
2006-09-11
A thin layer (2000 A) of Alumina film (Al2O3) deposition should work for
your scanning evaluations.
Alumina is very hard and also transparent when deposited thin. Best
Regards, Gautham
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