durusmail: mems-talk: Gold etching problem
Gold etching problem
Gold etching problem
garber@engr.uconn.edu
2006-09-17
Sarah,

What are you using to etch your Au/Cr and is your substrate seeing heat
while the metals are on?

Brent

Anyone who can help me with the following question would be greatly
appreciated-

I make small wells in boro glass with raised lips around the edges using
a gold/cr mask. When I try to do my final gold/chrome etch to get it all
the metal off, some metal still hangs on to the edges of the wells or
around the lips. I've tried sonicating 1 hr + in gold/chrome etch but
it's not seeming to do the trick...anyone know how to comabt what I
believe is a surface tension issue
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