durusmail: mems-talk: Re: Problems with my Ti/Au wet etching process
Re: Problems with my Ti/Au wet etching process
2006-09-26
2006-09-26
2006-09-27
2006-09-28
2006-09-27
2006-09-27
Re: Problems with my Ti/Au wet etching process
Vinay
2006-09-26
Hi Ali,
One possible recipe to etch Ti is:
20H2O(DI) : 1HF : 1H2O2.

Regards,
vinay
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