durusmail: mems-talk: Re: Problems with my Ti/Au wet etching process
Re: Problems with my Ti/Au wet etching process
2006-09-26
Vinay
2006-09-26
ahajjiah@vt.edu
2006-09-27
Brad Cantos
2006-09-28
deepa sree
2006-09-27
Vinay
2006-09-27
Roger Shile
Re: Problems with my Ti/Au wet etching process
ahajjiah@vt.edu
2006-09-26
Vinay,
Does this etch etch thourgh GaAs or AlGaAs?
Ali


Quoting Vinay :

> Hi Ali,
> One possible recipe to etch Ti is:
> 20H2O(DI) : 1HF : 1H2O2.
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