For any simulation work on micro/nano stuff check out www.nanohub.org, it
has T-suprem and many other tools, you can run tools online so you don't
have to download it and it is completely free...

Oguz


On 9/25/06, Jordi Teva  wrote:
>
> Dear all,
>
>
> I need a free simulator of oxidation, diffusion, ion implantation, etc..
> and
> other processes on Silicon.
> I have heard about Supreme and Athena but I don't know if they are free.
>
> Any help would be appreciated,
>