Photoresist with smooth and high resolution sidewall
Hsiu-Jen Wang
2006-09-29
Hi,
"high resolution sidewall" means the roughness of the surface of
the sidewall is in sub-micron, even down-scale to sub-100nm.
Alton Wang
University of Washington
On 9/29/06, Roger Shile wrote:
> Pray tell what is a "high resolution sidewall"?