durusmail: mems-talk: Nickel wet etching
polyimide
Nickel wet etching
2006-10-18
2006-10-18
2006-10-18
Anyone know what this thing called and where to buy it from? Chip carrier? Chip bonding packaging pad?
Anyone know what this thing called and where to buy itfrom? Chip carrier? Chip bonding packaging pad?
2006-10-19
Anyone know what this thing called and where to buy it from? Chip carrier? Chip bonding packaging pad?
2006-10-19
Nickel wet etching
Roger Shile
2006-10-18
I usually use Aluminum Etch (phosphoric Acid based) to etch Ni films.  I
believe JT Baker is a supplier.

Roger Shile

-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org]
On Behalf Of prabhu arumugam
Sent: Wednesday, October 18, 2006 9:18 AM
To: General MEMS discussion
Subject: [mems-talk] Nickel wet etching

Hello MEMS folks,
can anyone tell me the what we use to etch nickel
films (approx. 30 nm thick)deposited by ebeam and the
supplier.
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