I usually use Aluminum Etch (phosphoric Acid based) to etch Ni films. I believe JT Baker is a supplier. Roger Shile -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of prabhu arumugam Sent: Wednesday, October 18, 2006 9:18 AM To: General MEMS discussion Subject: [mems-talk] Nickel wet etching Hello MEMS folks, can anyone tell me the what we use to etch nickel films (approx. 30 nm thick)deposited by ebeam and the supplier.