durusmail: mems-talk: Microwire deposition!!
Microwire deposition!!
2006-10-19
Microwire deposition!!
madhav rao
2006-10-19
Dear all,
         Can anyone give me a simple idea of
depositing Aluminium micro wire of 500nm thick & 4um
wide using photolithography, after nickel dots
deposition in the silicon wafer. The aluminium wires
are at a distance 1um form these dots.

Let me know


Thanks

Regards,
Madhav
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