durusmail: mems-talk: Nickel evaporation on PMMA!!!
Partial Metallization of Vertical Walls
2006-10-14
Partial Metallization of Vertical Walls
Nickel evaporation on PMMA!!!
2006-10-23
2006-10-23
Nickel evaporation
2006-10-25
2006-10-26
Nickel evaporation on PMMA!!!
madhav rao
2006-10-23
Hi All,
       I am going through all possible combinations
and conditions to grow Nickel Dots. I am looking
forward to grow Nickel Dots using electron
beam lithography. Hence I would be using PMMA(poly
methyl methacrylate) e-beam resist. After patterning
this resist, we need to evaporate Nickel through
Edwards 306 Evaporator. I just wanted to know, whether
this PMMA on Silicon wafer during Nickel Evaporation
gets affected. Let me know about this.


Thanks

Regards,
Madhav
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