durusmail: mems-talk: grainy aluminum film
grainy aluminum film
2006-11-06
2006-11-06
2006-11-07
grainy aluminum film
Andrew Xiang
2006-11-06
We looked at our aluminum under SEM and notice the surface is very grainy under
40,000X. Don't know if it is normal. The Al is evaporated at 1E-6 torr at 50A/s.
Thickness about 1600A. Are there ways to reduce the grain structure and make it
more smooth?

-Andrew
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