Hi,

I'd like to set some true operating temp and humidity windows for some
coating processes in our wafer fab.
I don't have the option of disrupting production by pushing our wafer fab
humidity/temp all over the map...I'd like to set up a micro environment
around specific coaters and run some controlled expts.
Does anyone know if there exists a company that can supply small
"baghouses/tents" that can be set up around various process tools (approx 6'
longX4deep'X7'high).
The microenvironment should have it's own temp/humidty controllers.

thanks in advance,

Gerry Overton
Wafer Fab Engineering Manager
gerry.overton@istat.ca