Gareth Jenkins wrote: > When spinning SU-8 2100 (at 1000rpm) I consistently get thicker than > expected layers. According to the datasheets, I should get 260um but I > get around 400um or more instead. > I am using silicon as a substrate and everything else is fine - I have > good adhesion and uniformity. > It's not a huge issue as I can always increase the speed but it seems > odd to have such a big variation. My SU-8 is quite old so perhaps I have > lost some solvent from it? This is possible. I talked once with the support of our supplier and he told me that the typical aging effects of SU-8 are thicker layers and the thickness of the layers isn't as uniform anymore. The reason is in fact that the solvent evaporates. Note, this is supposed to happen only *after* the expiry date. cu Michi