Hi all, i'm quietly new to silicon micromachinign.
i want to realize silicon nitride cantilevers and beams.
After silicon nitride pattering, i've tried to release cantilevers and
membranes using KOH underetch. All bridges and cantilever were lost:
during the underetch, they become thinner and thinner...
Which could be the problem ?

Any help whould be very appreciated

Best regards,
Andrea Mazzolari