Hi,

I'm working on Au electrodeposition to fill up Au in my patterned pore array
in silicon nitride. I have Au in the pores and they look very nice. But, my
problem is that I have Au particles (small spheres) everywhere on the
silicon nitride surface. My substrate is glass with e-beam evaporated Ti/Au
= 20/300 nm and 500 nm PECVD Si3N4 on top of the Au. The Au plating solution
is KAu(CN)2. Has anyone done Au electrodeposition in silicon nitride?

Thanks a lot,
Tammy