Dear all I'm wet etching quartz with a BHF solution 6:1, but I have encounterd some difficulties in etching. What I do is a photolithographic process on the quartz substrate, a hardbake of 4 hours at 180° and then the wet etching process. What I obtain though is the rearrangement of the photoresist in a disordered pattern and no etching! Has anyone an idea where I go wrong? Barbara