Hi Barbara,

I had some time a similar problem and the conclusion was that the hotplate
temperature was not completely uniform!. Maybe that is also producing your layer
not to be perfectly baked (it should be hard after baking).

Good luck!

Sonia.



-----Message d'origine-----
De : Barbara Cortese [mailto:KORTESEB@libero.it]
Envoyé : Thursday, December 14, 2006 8:41 AM
À : mems-talk
Objet : [mems-talk] Su8-2100 soft bake


Dear all

Recently we met a problem using SU-8 2100. When spinning (at 1000rpm),after
softbake treatment, waves appear on the layer. The hotplate I use is levelled,
and I am using as a substrate silicon. The soft bake lasts 15 minutes at 65°and
60 min at 95°. I tried longer times of soft bake but the problem is always the
same, and the layer is always soft.
Can you help me to solve this problem? What do you think the problem is caused
by?


Barbara Cortese


------------------------------------------------------
Passa a Infostrada. ADSL e Telefono senza limiti e senza canone Telecom
http://click.libero.it/infostrada14dic06



********************************************************************************
**
Ce courrier électronique s'adresse uniquement à la personne désignée
ci-dessus, il est confidentiel et ne doit pas être remis à une autre
personne, ni reproduit et son contenu ne peut être autrement divulgué..
Si ce courrier électronique vous est transmis par erreur, veuillez
nous en avertir immédiatement à l'adresse securite@ino.ca. Nous
vous remercions de votre collaboration.

This email is directed in confidence solely to the person named above,
and may not otherwise be distributed, copied or disclosed. If you have
received this email by error, please notify us immediately by email to
address security@ino.ca. Thank you for your cooperation.
********************************************************************************
**