[mems-talk] Any good selective etch process to etch P-type Si and stops at intrinsic Si?

Any good selective etch process to etch P-type Si and stops at intrinsic Si?

2007-01-10

Any good selective etch process to etch P-type Si and stops at intrinsic Si?

Chris Park

2007-01-10

Hi All
Does anyone know good etch process or any service provider to
selectively etch p-type Si substrate but stops the etching at undoped
(very lightly unintentional p doped) Si epi?
Thanks in advance,
Chris Park