Dadhichi:

What type of plasma etch system do you have? Bob Henderson


-----Original Message-----
From: drp32@cam.ac.uk
To: mems-talk@memsnet.org
Sent: Mon, 15 Jan 2007 7:52 AM
Subject: [mems-talk] nitride etch


hi,
could anybody share with me her/his nitride etching recepie please?!!! wish to
etch away ~200nm of nitride (SiNx) from a polymer substrate! cheers