i have been using the cad tool called Coventor for long time. i dont think
it is free but it has demo version, if u want any help i can do,

regards
yogi

On Sat, 28 Oct 2006 anu67@sancharnet.in wrote:

> Dear all
> am in search of a free cad tool for mems. I want to do elelctromechanical
> analysis. Could, someone please suggest me a fre software for this purpose