Martyn, An interesting question. As image reversal depends upon the refractive index on resist you would think we would have the answer. I am ashamed to say we do not. If you are looking for differences in resist profile caused by refraction index changes I may be able to help you. Using ammonia to reverse the action of your original exposure and a controlled flood exposure and develop. The resist side wall can be controlled between -22 degrees through vertical to + 22 degrees. If this is of any help contact me directly for technical papers and information on free testing. Bill Moffat, CEO Yield Engineering Systems, Inc. 2185 Oakland Rd., San Jose, CA 95131 (408) 954-8353 cell 408 590 4577 bmoffat@yieldengineering.com www.yieldengineering.com -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Martyn Gadsdon Sent: Friday, February 09, 2007 6:20 AM To: mems-talk@memsnet.org Subject: [mems-talk] Refractive Index of Photoresists Dear All, I am interested in finding out what the difference in refractive index is between un-exposed (with uv radiation) and exposed photoresist. Particularly I am interested in knowing what photoresist (or other substance that can be applied by spinning) will give me the most difference in refractive index between exposed and unexposed areas.