durusmail: mems-talk: Adhesion Mechanism between HMDS and PMMA
Adhesion Mechanism between HMDS and PMMA
2007-02-09
2007-02-13
Adhesion Mechanism between HMDS and PMMA
CLAUDIO T MUNOZ
2007-02-09
Dear Members,
In one of my  project I am characterizing PMMA films deposited on silicon
substrate. To enhance adhesion I was told to use HMDS (hexamethyldisilozane). My
question is: What is the chemical or physical interaction between the PMMA film
and the HMDS layer that makes the latter a good adhesion promoter for PMMA.
Would PMMA films wet better over hydrophilic substrates as SiOx? I say this
thinking on the possibility that PMMA could form strong hydrogen bonding with
the SiOx substrate.
I am specifically concerned about the mechanism of adhesion between PMMA and
HMDS.
I believe some of our dear members might probably share some ideas to help me to
understand my question.
I will highly appreciate suggestions and comments
thanks
Claudio M
Chemical Engineering
University of Wisconsin-Madison
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