Hi Martyn, If my memory doesn't fail me, novolac based positive resist index changes from ~1.63 to about 1.67 after exposure, or at least it used to be that way in 1983 shay -----Original Message----- From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On Behalf Of Martyn Gadsdon Sent: Friday, February 09, 2007 4:20 PM To: mems-talk@memsnet.org Subject: [mems-talk] Refractive Index of Photoresists Dear All, I am interested in finding out what the difference in refractive index is between un-exposed (with uv radiation) and exposed photoresist. Particularly I am interested in knowing what photoresist (or other substance that can be applied by spinning) will give me the most difference in refractive index between exposed and unexposed areas.