Hi Claudio,

There is a good description of the mechanisms involved in chemical
adhesion promotion in the following reference (of which I am
co-author):

Journal of Micromechanics and Microengineering, Volume 16, Issue 6,
pp. S161-S168 (2006)

Hope this helps. If you do not subscribe to this service, shoot me an
e-mail and I'll send you a pdf.

Regards,

Michael

> ---------- Forwarded message ----------
> From: CLAUDIO T MUNOZ 
> To: mems-talk@memsnet.org
> Date: Fri, 09 Feb 2007 14:32:11 -0600
> Subject: [mems-talk] Adhesion Mechanism between HMDS and PMMA
> Dear Members,
> In one of my  project I am characterizing PMMA films deposited on silicon
substrate. To enhance adhesion I was told to use HMDS (hexamethyldisilozane). My
question is: What is the chemical or physical interaction between the PMMA film
and the HMDS layer that makes the latter a good adhesion promoter for PMMA.
Would PMMA films wet better over hydrophilic substrates as SiOx? I say this
thinking on the possibility that PMMA could form strong hydrogen bonding with
the SiOx substrate.
> I am specifically concerned about the mechanism of adhesion between PMMA and
HMDS.
> I believe some of our dear members might probably share some ideas to help me
to understand my question.
> I will highly appreciate suggestions and comments
> thanks
> Claudio M
> Chemical Engineering
> University of Wisconsin-Madison