durusmail: mems-talk: pmma lithography
pmma lithography
2007-02-25
2007-02-26
pmma lithography
davidfozdar@mail.utexas.edu
2007-02-25
PMMA is used mostly for electron beam lithography (EBL).  I don't think it
responds to UV light; although, I've never exposed PMMA.

David Fozdar

University of Texas at Austin
Deparment of Mechanical Engineering - Thermal/Fluids Systems
Center for Nano Molecular Science and Technology (CNM)

Quoting Chen Han Lee :

> hi all,
>
> i am wondering if pmma can be patterned by UV radiation?
> I know that the most common exposure source is X-ray, but is there others?
>
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