±¸ÀÚÇö wrote:
>
> I have got some questions regarding to anisotropic etching of  <100>
> wafers
> we are etching v-grooves on 4" <100> wafers.  there are some problems
> about  silicon undercutting.
> I heard that isopropyl alcohol may be added to reduce the undercutting.
> but Isopropyl alcohol does not mix with water .
> We are now using KOH+ D.I water etchant  and considering new method to
> add  isopropyl alcohol.
> I want to know the way to mix with isopropyl alcohol. we tried some
> methods using stirrer etc but failed.
> If you have a good method. please tell me the method as soon as
> possible!
>
>
You can't make the isopropyl/water mix, but etchant work well with
isopropyl separeted on the top. You have to use  stirrer and condenser
on the top to prevent isopropyl evaporation at 70 - 90 C.

Good luck