google "UV expose PMMA" and you will find lots of info including the Microchem datasheet on PMMA which includes the statement: "DUV(deep UV): Low sensitivity, requiring doses >500mJ/cm2 at 248nm. " On Feb 25, 2007, at 3:44 PM, davidfozdar@mail.utexas.edu wrote: > PMMA is used mostly for electron beam lithography (EBL). I don't > think it > responds to UV light; although, I've never exposed PMMA.